公开(公告)号：US5375061A

公开(公告)日：1994-12-20

申请号：US799181

申请日：1991-11-27

申请人： Kenjiro Hara ,  Atsunori Kajio

发明人： Kenjiro Hara ,  Atsunori Kajio

IPC分类号： H01L21/02 ,  G05B19/418 ,  G06F15/24 ,  G06F15/46

CPC分类号： G05B19/41865 ,  G05B2219/31429 ,  G05B2219/45026 ,  Y02P90/20 ,  Y10S438/98

摘要： A production management method in a production system for semiconductor devices uses processing progress information for each of the plural number of manufacturing apparatus as the basis for performing start allocation of a plural number of next start product groups. When the state of progress has reached a certain stage and is close to the end, a product group of the same type as that which a manufacturing apparatus is processing from amongst start standby product groups is determined as the object of same type priority allocation. A link is made beforehand between that product group and a manufacturing apparatus for which that processing is about to end, and a product group that is an object of same type priority allocation to a manufacturing apparatus that is processing products of that same type, is not started by a manufacturing apparatus that is processing a product of a different type even if that manufacturing apparatus finishes its processing of a product of that different type earlier.

摘要翻译： 半导体装置的生产系统中的生产管理方法使用多个制造装置中的每一个的处理进度信息作为执行多个下一个起始产品组的开始分配的基础。 当进度状态达到一定阶段并且接近尾声时，确定与起始待机产品组中正在处理的制造装置相同类型的产品组作为相同类型优先级分配的对象。 预先在该产品组和该处理即将结束的制造装置之间建立链接，作为正在处理该相同类型的产品的制造装置的同类型优先级分配对象的产品组不是 即使该制造装置对其不同类型的产品的处理更早地进行处理也是不同类型的产品的制造装置。