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公开(公告)号:US20230290125A1
公开(公告)日:2023-09-14
申请号:US17942815
申请日:2022-09-12
Applicant: Kioxia Corporation
Inventor: Bo WANG , Youyang NG , Yuchieh LIN , Kengo NAKATA , Takeshi FUJIWARA
IPC: G06V10/774 , G06V10/40 , G06V10/82 , G06V10/764 , G06V20/70 , G06V10/776
CPC classification number: G06V10/7747 , G06V10/40 , G06V10/82 , G06V10/764 , G06V20/70 , G06V10/776
Abstract: An image processing apparatus has a first image acquisitor that acquires a source image, a second image acquisitor that acquires a first target image, a label acquisitor that acquires a label, a feature extractor including a first neural network that extracts a feature of the source image and a feature of the first target image, a class classifier including a second neural network that performs a class classification of the source image and the first target image, a domain classifier including a third neural network that performs a domain classification of the source image and the first target image, a processor that assigns a pseudo label to the first target image, a self-learner that performs a self-learning of the first neural network, the second neural network, and the third neural network, and a learner that learns the first, second and third neural networks, by performing a back propagation process.
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公开(公告)号:US20220076398A1
公开(公告)日:2022-03-10
申请号:US17191063
申请日:2021-03-03
Applicant: Kioxia Corporation
Inventor: Youyang NG , Bo WANG , Takuji OHASHI , Osamu YAMANE , Takeshi FUJIWARA
Abstract: An information processing apparatus has an acquisitor configured to acquire an entire area image obtained by capturing an entire area of a processing surface of a wafer including at least one defect, a training image selector configured to select, as a training image, a partial image including at least one defect from the entire area image, a model constructor configured to construct a calculation model of generating a label image obtained by extracting and binarizing the defect included in the partial image, and a learner configured to update a parameter of the calculation model based on a difference between the label image generated by inputting the training image to the calculation model and a reference label image obtained by extracting and binarizing the defect of the training image.
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