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公开(公告)号:US20070050092A1
公开(公告)日:2007-03-01
申请号:US11503725
申请日:2006-08-14
申请人: Kirk Kenyon , Eric Low , Adam Safir
发明人: Kirk Kenyon , Eric Low , Adam Safir
IPC分类号: G06F19/00
摘要: Systems, methods and apparatus for designing a process to be performed at regions of an experiment library, the process involving the application of components at the library regions. Components are associated with regions of the experiment library. Each of the components represents a material or process parameter to be applied at the regions. A plurality of experiment stages are defined, each having one or more associated event types that are selected from predetermined event types and define a start condition for the corresponding stage. For each of the library regions, the components are associated with one or more of the experiment stages. A plurality of component profiles are generated, which represent processes to be performed at the various regions, and which describe the application over time of one or more of the components associated with a corresponding region or regions according to the associated experiment stages.
摘要翻译: 用于设计在实验库区域执行的过程的系统,方法和设备,涉及在库区应用组件的过程。 组件与实验库的区域相关联。 每个组件表示要在该区域应用的材料或工艺参数。 定义多个实验阶段,每个实验阶段具有从预定事件类型中选择的一个或多个相关联的事件类型并且定义相应阶段的开始条件。 对于每个库区域,组件与一个或多个实验阶段相关联。 生成多个组件简档,其表示将在各个区域执行的处理,并且根据相关联的实验阶段描述与相应区域相关联的一个或多个组件随着时间的应用。