公开(公告)号：US20100220339A1

公开(公告)日：2010-09-02

申请号：US12689358

申请日：2010-01-19

申请人： Klaus Rinn ,  Andreas Schaaf ,  Andre Schepp

发明人： Klaus Rinn ,  Andreas Schaaf ,  Andre Schepp

IPC分类号： G01B11/24 ,  G06F17/18

CPC分类号： G01B11/03

摘要： A method for determining the positions of structures (3) on a mask (2) is disclosed. The method is implemented in a metrology tool (1) comprising a measurement table (20) which is movable in X-coordinate direction and Y-coordinate direction. A first intensity profile (IX) is recorded along a first measurement direction (MRX), which is parallel to the X-coordinate direction. A second intensity profile (IY) is recorded along a second measurement direction (MRY), which is parallel to the Y-coordinate direction. A two-dimensional position of a centre of gravity (S) with respect to the coordinate system of the metrology tool (1) is determined from the first intensity profile (IX) and the second intensity profile (IY).

摘要翻译： 公开了一种用于确定掩模（2）上的结构（3）的位置的方法。 该方法在包括可在X坐标方向和Y坐标方向上移动的测量台（20）的计量工具（1）中实现。 沿着与X坐标方向平行的第一测量方向（MRX）记录第一强度分布（IX）。 沿着与Y坐标方向平行的第二测量方向（MRY）记录第二强度分布（IY）。 根据第一强度分布（IX）和第二强度分布（IY）确定相对于计量工具（1）的坐标系的重心（S）的二维位置。

公开(公告)号：US08248618B2

公开(公告)日：2012-08-21

申请号：US12689358

申请日：2010-01-19

申请人： Klaus Rinn ,  Andreas Schaaf ,  Andre Schepp

发明人： Klaus Rinn ,  Andreas Schaaf ,  Andre Schepp

IPC分类号： G01B11/24 ,  G06F17/18

CPC分类号： G01B11/03

摘要： A method for determining the positions of structures (3) on a mask (2) is disclosed. The method is implemented in a metrology tool (1) comprising a measurement table (20) which is movable in X-coordinate direction and Y-coordinate direction. A first intensity profile (IX) is recorded along a first measurement direction (MRX), which is parallel to the X-coordinate direction. A second intensity profile (IY) is recorded along a second measurement direction (MRY), which is parallel to the Y-coordinate direction. A two-dimensional position of a centre of gravity (S) with respect to the coordinate system of the metrology tool (1) is determined from the first intensity profile (IX) and the second intensity profile (IY).

摘要翻译： 公开了一种用于确定掩模（2）上的结构（3）的位置的方法。 该方法在包括可在X坐标方向和Y坐标方向上移动的测量台（20）的计量工具（1）中实现。 沿着与X坐标方向平行的第一测量方向（MRX）记录第一强度分布（IX）。 沿着与Y坐标方向平行的第二测量方向（MRY）记录第二强度分布（IY）。 根据第一强度分布（IX）和第二强度分布（IY）确定相对于计量工具（1）的坐标系的重心（S）的二维位置。