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公开(公告)号:US06981410B2
公开(公告)日:2006-01-03
申请号:US10434563
申请日:2003-05-09
申请人: Koji Seki , Nobuhiko Zushi , Shinichi Ike , Seishi Nakano , Tarou Nakata , Shoji Kamiunten
发明人: Koji Seki , Nobuhiko Zushi , Shinichi Ike , Seishi Nakano , Tarou Nakata , Shoji Kamiunten
IPC分类号: G01F1/68
CPC分类号: G01F1/692 , G01F1/6845 , G01F1/6847
摘要: A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.
摘要翻译: 流量传感器包括基板,电绝缘膜和流速检测机构。 在基板中,与测量对象流体接触的第一表面的膜片部分和围绕隔膜部分的厚的固定部分一体地形成。 电绝缘膜形成在隔膜部分的与第一表面相对的一侧的第二表面上。 流速检测机构设置在电绝缘膜上。 还公开了一种制造流量传感器的方法。