DEAERATION DEVICE, DROPLET DISCHARGE DEVICE, DEAERATION PERFORMANCE DETERIORATION DETERMINATION METHOD, AND STORAGE MEDIUM

    公开(公告)号:US20250083451A1

    公开(公告)日:2025-03-13

    申请号:US18882260

    申请日:2024-09-11

    Abstract: Provided is a deaeration device that includes an external reflux-type deaeration module including a gas permeable membrane capable of removing dissolved gas in liquid, and a hardware processor. The deaeration module includes a first vacuum chamber that communicates with a first end of the gas permeable membrane, a second vacuum chamber that communicates with a second end of the gas permeable membrane, and an atmospheric vent valve that opens or closes an inside of the deaeration module to atmosphere. The hardware processor determines a deterioration in deaeration performance of the deaeration module based on a pressure difference between the first vacuum chamber and the second vacuum chamber when the atmospheric vent valve is closed.

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