公开(公告)号：US20200266381A1

公开(公告)日：2020-08-20

申请号：US16761739

申请日：2018-11-09

Applicant: Konica Minolta, Inc.

Inventor： Yukihiro MAKISHIMA ,  Hideo TAKA ,  Hiroshi KITA ,  Yoshiyuki SUZURI ,  Lina YOSHIDA

IPC: H01L51/52 ,  H05B33/10 ,  H01L29/786 ,  H01L51/50 ,  H01L51/56 ,  H05B33/04

Abstract: The present invention addresses the problem of providing a manufacturing method for an electronic device that is provided with an organic thin film functioning as a sealing film against moisture permeation in an electronic device such as an organic electroluminescence element. This manufacturing method for an electronic device is a manufacturing method for an electronic device that has at least an organic functional layer, an elution prevention film, and a sealing film in this order, said manufacturing method being characterized by having: a step in which, after coating is performed with a silicone resin, the result is irradiated with vacuum ultraviolet rays to form the elution prevention film; and a step in which, after the elution prevention film is coated with a liquid mixture of a metal alkoxide and a fluoroalcohol, the result is irradiated with vacuum ultraviolet rays to form the ultraviolet rays to form the sealing film.