公开(公告)号：US20130344255A1

公开(公告)日：2013-12-26

申请号：US13915976

申请日：2013-06-12

Applicant: Korea Institute Of Science And Technology

Inventor： Hyun-Kwang SEOK ,  Yu-Chan KIM ,  Eun-Young CHOI ,  Kyeong-Ho BAIK ,  Kyung-Hun BYUN ,  Hoon JEONG

IPC: C09D5/08

CPC classification number: C09D5/084 ,  C23C4/11 ,  C23C4/134 ,  C23C28/32 ,  C23C28/3455 ,  C23C28/36 ,  Y10T428/2982

Abstract: Disclosed are a thermal spray coating material which greatly improves corrosion resistance, as compared to conventional Al2O3 and Y2O3 crystalline coatings and Al—Y—O and Al—Zr—O amorphous thermal spray coatings, a production method of the coating material, and a coating method using the same. The thermal spray coating material has a chemical formula of Y2xZr1-xOx+2, where x ranges from 0.19 to 0.83, preferably from 0.35 to 0.69. Accordingly, it is possible to produce a coating material for use in a chamber of vacuum plasmas equipment or internal parts of the chamber can be produced, which improves the corrosion resistance of a protective coating film upon ceramic thermal spray coating and lengthens the lifespan of parts.

Abstract translation: 公开了与传统的Al 2 O 3和Y 2 O 3结晶涂层和Al-YO和Al-Zr-O无定形热喷涂，涂覆材料的制造方法和使用的涂覆方法相比，大大提高耐腐蚀性的热喷涂材料 一样。 热喷涂材料具有Y2xZr1-xOx + 2的化学式，其中x为0.19至0.83，优选为0.35至0.69。 因此，可以生产用于真空等离子体设备的室中的涂料，或者可以制造室的内部部件，这提高了陶瓷热喷涂时的保护涂膜的耐腐蚀性并延长了部件的使用寿命 。