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    Levitation unit with a tilting function and levitation device
    6.
    发明申请
    Levitation unit with a tilting function and levitation device 审中-公开
    悬浮单元具有倾斜功能和悬浮装置

    公开(公告)号：US20080122151A1

    公开(公告)日：2008-05-29

    申请号：US11723306

    申请日：2007-03-19

    申请人： Masashi Ito ,  Hisanobu Niwa ,  Masaki Saito

    发明人： Masashi Ito ,  Hisanobu Niwa ,  Masaki Saito

    IPC分类号： F16C32/06

    CPC分类号： F16C32/06

    摘要： A rocking substrate 31 provided with a porous unit 41 is supported by a platform 21 by means of a spherical bearing. Furthermore, air is provided between the platform 21 and the rocking substrate 31 to allow the rocking substrate 31 and the porous unit 41 to rock along a spherical surface. This rocking allows the top surface 12a of an improved levitation unit 12 to tilt freely. When a wavy glass substrate is placed on the levitation device, the top surface 12a of the improved levitation unit 12 tilts, tracing the tilt of the substrate. Jetting air out in this state levitates the substrate, with its top surface 12a in the horizontal state, and allows the levitational force to be reliably applied to the substrate.

    摘要翻译： 设置有多孔单元41的摆动基板31由平台21通过球面轴承支撑。 此外，在平台21和摇摆基板31之间设置空气，以使摇摆基板31和多孔单元41沿球面滚动。 该摇摆允​​许改进的悬浮单元12的顶表面12a自由倾斜。 当波纹玻璃基板被放置在悬浮装置上时，改进的悬浮单元12的顶表面12a倾斜，跟踪基板的倾斜。 在这种状态下喷射空气使基板浮起，其顶表面12a处于水平状态，并且允许悬浮力可靠地施加于基板。