公开(公告)号：US08076921B1

公开(公告)日：2011-12-13

申请号：US12284475

申请日：2008-09-18

申请人： Kristopher Nodianos ,  Laura Blachek ,  Khoa Nguyen ,  Adedayo Oyelowo ,  Tan Tran ,  Bernice Sanford ,  Kevin Cochran

发明人： Kristopher Nodianos ,  Laura Blachek ,  Khoa Nguyen ,  Adedayo Oyelowo ,  Tan Tran ,  Bernice Sanford ,  Kevin Cochran

IPC分类号： G05F3/02

CPC分类号： H02M3/158

摘要： Systems and methods for a self-regulating power supply for MEMS thermal actuators to achieve maximum actuator displacement while preventing over powering. The present invention includes a power supply configured to regulate electrical input power to a MEMS thermal actuator in order to provide the maximum possible electrical input power. Accordingly, the present invention provides a maximum actuator displacement while preventing device failure from over powering. The present invention utilizes resistivity versus temperature properties for silicon or the like to provide a self-regulating power supply that can be utilized to power a variety of MEMS components without requiring custom actuator control circuits for each type of component.

摘要翻译： 用于MEMS热致动器的自调节电源的系统和方法，以在防止过功率的情况下实现最大的致动器位移。 本发明包括被配置为调节对MEMS热致动器的电输入功率以便提供最大可能的电输入功率的电源。 因此，本发明提供最大的致动器位移，同时防止装置发生过功率故障。 本发明利用硅等的电阻率对温度特性来提供可用于为各种MEMS部件供电的自调节电源，而不需要针对每种类型的部件的定制的致动器控制电路。