公开(公告)号：US08703364B2

公开(公告)日：2014-04-22

申请号：US13465266

申请日：2012-05-07

申请人： Kun-Lung Hsieh ,  Chung-Hung Lin ,  Min-An Yang ,  Chih Wei Wen ,  Wu Hung Ko

发明人： Kun-Lung Hsieh ,  Chung-Hung Lin ,  Min-An Yang ,  Chih Wei Wen ,  Wu Hung Ko

IPC分类号： G03F1/72

CPC分类号： G03F1/72 ,  G03F1/70

摘要： A method for repairing a defect, such as a pinhole, on a photomask is described. In an example, a laser beam is used to form a matrix of laser burn spots in a substrate of the photomask proximate a defect, such as a pinhole, of the photomask. Each laser burn spot is formed at a focal point of the laser beam inside the substrate by melting a material of the substrate proximate to the defect. In an example, the defect is surrounded and covered by the matrix of laser burn spots. The matrix of laser burn spots can attenuate or block light from passing through the defect, such as the pinhole. The matrix of laser burn spots may repair the defect of the photomask without removing a pellicle and pellicle frame mounted on the photomask.

摘要翻译： 描述了在光掩模上修复诸如针孔的缺陷的方法。 在一个示例中，激光束用于在光掩模的缺陷（例如针孔）附近的光掩模的衬底中形成激光烧伤斑点的矩阵。 通过使靠近缺陷的衬底的材料熔化，在激光束的焦点处形成每个激光烧伤点。 在一个例子中，缺陷被激光烧伤点的矩阵包围并覆盖。 激光烧伤点的阵列可以衰减或阻挡光线穿过缺陷，如针孔。 激光烧伤斑点的矩阵可以修复光掩模的缺陷，而不会去除安装在光掩模上的防护薄膜组件和防护薄膜组件框架。

公开(公告)号：US20130295494A1

公开(公告)日：2013-11-07

申请号：US13465266

申请日：2012-05-07

申请人： Kun-Lung Hsieh ,  Chung-Hung Lin ,  Min-An Yang ,  Chih Wei Wen ,  Wu Hung Ko

发明人： Kun-Lung Hsieh ,  Chung-Hung Lin ,  Min-An Yang ,  Chih Wei Wen ,  Wu Hung Ko

IPC分类号： G03F1/72 ,  G03F1/62 ,  G03F1/68

CPC分类号： G03F1/72 ,  G03F1/70

摘要： A method for repairing a defect, such as a pinhole, on a photomask is described. In an example, a laser beam is used to form a matrix of laser burn spots in a substrate of the photomask proximate a defect, such as a pinhole, of the photomask. Each laser burn spot is formed at a focal point of the laser beam inside the substrate by melting a material of the substrate proximate to the defect. In an example, the defect is surrounded and covered by the matrix of laser burn spots. The matrix of laser burn spots can attenuate or block light from passing through the defect, such as the pinhole. The matrix of laser burn spots may repair the defect of the photomask without removing a pellicle and pellicle frame mounted on the photomask.

摘要翻译： 描述了在光掩模上修复诸如针孔的缺陷的方法。 在一个示例中，激光束用于在光掩模的缺陷（例如针孔）附近的光掩模的衬底中形成激光烧伤点的矩阵。 通过使靠近缺陷的衬底的材料熔化，在激光束的焦点处形成每个激光烧伤点。 在一个例子中，缺陷被激光烧伤点的矩阵包围并覆盖。 激光烧伤点的阵列可以衰减或阻挡光线穿过缺陷，如针孔。 激光烧伤斑点的矩阵可以修复光掩模的缺陷，而不会去除安装在光掩模上的防护薄膜组件和防护薄膜组件框架。