公开(公告)号：US06313915B1

公开(公告)日：2001-11-06

申请号：US09383236

申请日：1999-08-26

申请人： Kuniaki Yanagisawa ,  Yoshinori Ikeda ,  Shintaro Koike ,  Ryo Nishiki

发明人： Kuniaki Yanagisawa ,  Yoshinori Ikeda ,  Shintaro Koike ,  Ryo Nishiki

IPC分类号： G01B1114

CPC分类号： G01B11/306 ,  G01B11/026

摘要： A displacement measuring method and apparatus can measure positions and displacements of measurement objects with high precision without regard to surface roughness. Optical beams emitted from a light source are converged through an objective lens, are incident on a surface of the measurement object, are reflected off the surface of the measurement object, and are received by an optical detector. In measurement of the surface of the measurement object, optical-intensity curves are defined while the objective lens is being shifted in the optical-axis direction. According to optical-intensity curves thus defined, a threshold Pth is defined, a center of gravity of a graph region surrounded by the optical-intensity curve is defined, and the focal point of the objective lens, when positioned at the center of gravity, is determined to be the position of a surface of the measurement object.

摘要翻译： 位移测量方法和装置可以高精度地测量测量对象的位置和位移，而不考虑表面粗糙度。 从光源发射的光束通过物镜会聚，入射在测量对象的表面上，被测量对象的表面反射，并由光学检测器接收。 在测量对象的表面的测量中，在物镜在光轴方向上偏移的同时，限定光强度曲线。 根据如此定义的光强度曲线，定义阈值Pth，定义由光强度曲线包围的曲线图区域的重心，并且物镜的焦点在位于重心时， 被确定为测量对象的表面的位置。

公开(公告)号：US06862097B2

公开(公告)日：2005-03-01

申请号：US10609247

申请日：2003-06-26

申请人： Kuniaki Yanagisawa ,  Ryo Nishiki

发明人： Kuniaki Yanagisawa ,  Ryo Nishiki

IPC分类号： G01B11/24 ,  G01B11/25

CPC分类号： G01B11/25

摘要： A three-dimensional shape measuring method and a three-dimensional shape measuring apparatus of excellent measurement accuracy. An optical system comprises a light source, a pattern forming unit which is disposed on the optical axis of the light source to form slit light from the light from the light source, and a projection lens to collect the slit light on the object for measurement. An asymmetric diaphragm having an aperture in which the size in the direction perpendicular to the slit direction is smaller than the size in the slit direction is provided in order to stop the slit light. An image pickup optical system is provided to measure the three-dimensional shape of the object for measurement on the basis of the slit light reflected from the object for measurement.

摘要翻译： 三维形状测量方法和测量精度高的三维形状测量装置。 光学系统包括光源，设置在光源的光轴上以形成来自光源的光的狭缝光的图案形成单元和用于将狭缝光收集在测量对象上的投影透镜。 提供具有孔径的非对称膜片，其中垂直于狭缝方向的方向的尺寸小于狭缝方向的尺寸，以便阻止狭缝光。 提供一种摄像光学系统，用于根据从测量对象反射的狭缝光来测量用于测量的物体的三维形状。