公开(公告)号：US5450200A

公开(公告)日：1995-09-12

申请号：US216457

申请日：1994-03-23

申请人： Kyouji Imagawa ,  Kiyokazu Sakai

发明人： Kyouji Imagawa ,  Kiyokazu Sakai

IPC分类号： G01N21/23 ,  G01J4/00 ,  G01B11/16

CPC分类号： G01N21/23

摘要： A part for projecting a measuring light beam onto a sample and a light receiving part are arranged on the same side of a sample surface so that the measuring light beam is concentric with the light receiving part, the measuring light beam which is converted to a linearly polarized light beam through a polarizing element is projected to the sample so that the measuring light beam outgoing from the sample to the projecting side is received and detected through the same polarizing element. A plurality of sets of polarizing elements and light receiving parts are set so that the polarizing elements have different polarization directions, to calculate retardation from transmitted light intensity levels as obtained.

摘要翻译： 用于将测量光束投射到样品和光接收部分上的部分被布置在样品表面的同一侧，使得测量光束与光接收部分同心，测量光束被转换成线性 通过偏振元件的偏振光束被投射到样品，使得从样品出射到突出侧的测量光束通过相同的偏振元件被接收和检测。 设置多组偏振元件和光接收部件，使得偏振元件具有不同的偏振方向，以计算所获得的透射光强度水平的延迟。