公开(公告)号：US11426678B2

公开(公告)日：2022-08-30

申请号：US16968365

申请日：2019-08-06

Applicant: LG CHEM, LTD.

Inventor： Seok Kwang Hong ,  Hyoung Seok Kim ,  Hun Young Lee ,  Kwang Jin Jeong ,  Young Hwan Shin

IPC: B01D7/00 ,  H01L51/00 ,  H01L51/56

Abstract: A sublimation purification apparatus that includes a vacuum chamber; a tube housing positioned in the vacuum chamber; a boat in close contact with the tube housing; and heating units positioned adjacent to an outer surface of the boat and an outer surface of the tube housing, respectively, wherein a sublimation purification target material is contained in the boat, and at least one of the boat and the tube housing is formed of a metal.