公开(公告)号：US11817519B2

公开(公告)日：2023-11-14

申请号：US17535334

申请日：2021-11-24

Applicant: LG DISPLAY CO., LTD.

Inventor： Jaeho Yoon ,  Donghyeon Jang ,  Shihyung Park ,  Moonsoo Kang ,  Donghwan Lee

IPC: H01L31/117 ,  H01L27/146 ,  H10K39/36

CPC classification number: H01L31/117 ,  H01L27/14658 ,  H10K39/36

Abstract: A lower electrode of a PIN diode and a second protective layer covering the PIN diode are formed not using separate mask processes, but using the same mask process using the same mask, thereby reducing the number of mask processes and thus increasing process efficiency. Further, the lower electrode of the PIN diode is patterned and then the second protective film covering the PIN diode is patterned such that both the former patterning and the latter patterning are carried out using a single mask process, thereby reduce increase in defects due to foreign materials or stains.