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公开(公告)号：US10583586B2
公开(公告)日：2020-03-10
申请号：US15793784
申请日：2017-10-25
Applicant: LG Display Co., Ltd.
Inventor： Sung-Woo Choi , Chul-Ho Kim , Yun-Ho Kook
Abstract: An imprint mold includes a substrate; a pattern on the substrate and having a multi-layered structure; and an etch stop layer between an upper layer and a lower layer of the pattern.
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