MEMS SCANNER HAVING COIL AND MANUFACTURING METHOD OF COIL FOR MEMS SCANNER
    1.
    发明申请
    MEMS SCANNER HAVING COIL AND MANUFACTURING METHOD OF COIL FOR MEMS SCANNER 有权
    具有线圈的MEMS扫描仪和用于MEMS扫描仪的线圈的制造方法

    公开(公告)号:US20150277105A1

    公开(公告)日:2015-10-01

    申请号:US14674799

    申请日:2015-03-31

    CPC classification number: G02B26/085 G02B26/105

    Abstract: The present disclosure may provide a MEMS scanner including a mirror configured to reflect light, a gimbal connected to the mirror to rotatably support the mirror, and a winding portion provided at the mirror or the gimbal to generate an electromagnetic force in interaction with a magnetic field formed in the vicinity when a current flows therethrough so as to adjust a rotational angle of the mirror, wherein the winding portion includes a silicon layer, a coil layer deposited on the silicon layer to generate physical deformation due to a current flowing therethrough, and a plurality of hollow holes formed on the coil layer to provide elasticity so as to reduce an amount of impact due to the physical deformation, and increase the dissipation area of heat generated.

    Abstract translation: 本公开可以提供一种MEMS扫描仪,其包括被配置为反射光的反射镜,连接到反射镜的万向架以可旋转地支撑反射镜,以及设置在反射镜或万向节处的卷绕部分,以产生与磁场相互作用的电磁力 形成在电流流过的附近,以便调整反射镜的旋转角度,其中绕组部分包括硅层,沉积在硅层上的线圈层,以产生由于电流流过其中的物理变形,以及 多个中空孔形成在线圈层上,以提供弹性,以减少由于物理变形引起的冲击量,并增加产生的热量的耗散面积。

    COMBINED TYPE SENSOR DEVICE COMBINED WITH SENSOR MODULE

    公开(公告)号:US20230329516A1

    公开(公告)日:2023-10-19

    申请号:US17881269

    申请日:2022-08-04

    CPC classification number: A47L15/0063 A47L15/006

    Abstract: Disclosed is a combined type sensor device including a transceiver configured to transmit and receive data to and from a user terminal, a connector combined with a sensor module, and a processor configured to identify a type of the sensor module, to transmit the identified type of the sensor module to the user terminal through the transceiver, to update the sensor module based on a firmware file received from the user terminal through the transceiver, and to change communication setting according to the identified type of the sensor module.

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