Abstract:
The present disclosure may provide a MEMS scanner including a mirror configured to reflect light, a gimbal connected to the mirror to rotatably support the mirror, and a winding portion provided at the mirror or the gimbal to generate an electromagnetic force in interaction with a magnetic field formed in the vicinity when a current flows therethrough so as to adjust a rotational angle of the mirror, wherein the winding portion includes a silicon layer, a coil layer deposited on the silicon layer to generate physical deformation due to a current flowing therethrough, and a plurality of hollow holes formed on the coil layer to provide elasticity so as to reduce an amount of impact due to the physical deformation, and increase the dissipation area of heat generated.
Abstract:
Disclosed is a combined type sensor device including a transceiver configured to transmit and receive data to and from a user terminal, a connector combined with a sensor module, and a processor configured to identify a type of the sensor module, to transmit the identified type of the sensor module to the user terminal through the transceiver, to update the sensor module based on a firmware file received from the user terminal through the transceiver, and to change communication setting according to the identified type of the sensor module.