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公开(公告)号:US10393991B2
公开(公告)日:2019-08-27
申请号:US14784802
申请日:2014-04-21
Applicant: LG INNOTEK CO., LTD.
Inventor: Yong Jun Ko , Sang Won Seo , Jeong Gi Seo , Chul Kim , Don Han Jun , Wan Seop Choi
IPC: G02B7/02 , G02B26/08 , G02B26/00 , G02B7/09 , G02B7/08 , G03B3/10 , B81B7/02 , H02N1/00 , B81B3/00
Abstract: The disclosure provides a MEMS device including: a fixed substrate having a cavity; a driving unit disposed in the cavity and floating above the fixed substrate; and an elastic unit for physically connecting the fixed substrate with the driving unit and varying the height of the driving unit according to a control current, wherein the elastic unit includes a bimorph driving unit connected to the fixed substrate and bent according to the control current, a spring connected to the driving unit, and a frame connecting the bimorph driving unit to the spring. Therefore, in order to overcome the limitations according to the power consumption and the size-reduction due to a coil and a magnet, the MEMS device drives one lens and thus can reduce the power consumption and the size thereof.