公开(公告)号：US20040127039A1

公开(公告)日：2004-07-01

申请号：US10684666

申请日：2003-10-14

Applicant: LG. PHILIPS LCD CO., LTD.

Inventor： Dong Yuel Jo

IPC: H01L021/302 ,  H01L021/461

CPC classification number: H01L21/67063 ,  B08B15/02 ,  H01L21/67017

Abstract: An etchant fume exhaust apparatus is installed in a system performing an etching process during fabrication of LCDs. The etchant fume exhaust apparatus prevents the contamination and corrosion of the etching system by allowing both gaseous and liquid etchant to be discharged safely. The etchant fume exhaust apparatus includes an exhaust hole that provides a passage to discharge gaseous etchant, an exhaust plate located under the exhaust hole that collects condensed etchant dripping from the exhaust hole, a support part that fixes the exhaust plate to the exhaust hole, and an exhaust line connected to the bottom of the exhaust plate through which the etchant collected in the exhaust plate is removed from the etchant plate.

Abstract translation: 在液晶显示器的制造过程中，在执行蚀刻工艺的系统中安装有蚀刻剂排烟装置。 蚀刻剂排烟装置通过允许气态和液体蚀刻剂安全地排出来防止蚀刻系统的污染和腐蚀。 蚀刻剂排烟装置包括：排气孔，其设置排出气体蚀刻剂的通道;位于排气孔下方的排气板，其收集从排气孔滴下的冷凝的蚀刻剂;将排气板固定到排气孔的支撑部;以及 连接到排气板的底部的排气管，通过该排气板从废气板中收集的蚀刻剂从蚀刻板移除。