公开(公告)号：US10438831B2

公开(公告)日：2019-10-08

申请号：US15318383

申请日：2014-06-18

Applicant: LINTEC CORPORATION

Inventor： Naoki Taya ,  Yuki Nito ,  Yusuke Miyatake

IPC: H01L21/683 ,  B32B27/30 ,  B32B27/32 ,  B32B7/12 ,  B32B27/06 ,  C08L23/08 ,  C09J7/29

Abstract: A base film for dicing sheets that is used in a dicing sheet comprising the base film and a pressure sensitive adhesive layer laminated on one surface of the base film. The base film comprises at least a first resin layer that is in contact with the pressure sensitive adhesive layer of the dicing sheet and a second resin layer that comes into contact with the first resin layer when the base film for dicing sheets is wound up. The second resin layer has a crystallinity of 28% to 45%. The ratio of a tensile elastic modulus of the first resin layer to a tensile elastic modulus of the second resin layer is 1.2 to 3.0. The ratio of a thickness of the first resin layer to a thickness of the base film for dicing sheets is 25% to 80%.