专利检索 ap:("LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)") AND inv:"Torsten GRANZOW" 第 1 页

1.

发明公开
MATERIAL DEPOSITION METHOD AND MICROSYSTEM THEREWITH OBTAINED 审中-公开

公开(公告)号：US20240088202A1

公开(公告)日：2024-03-14

申请号：US18272513

申请日：2022-01-13

申请人： LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)

发明人： Naveen ARUCHAMY , Torsten GRANZOW , Emmanuel DEFAY , Sebastjan GLINSEK

IPC分类号： H10N30/093 , H10N30/067

CPC分类号： H01L28/56 , H10N30/067 , H10N30/093

摘要： A material deposition method comprising: providing a substrate; forming a film of HfO2 by chemical solution deposition, CSD, on the substrate; depositing a solution of PbTiO3 on the film of HfO2; depositing a layer of Pb(Zrx,Ti1-x)O3 on the seed layer, where O≤x≤1; and forming interdigitated electrodes on the Pb(Zrx,Ti1-x)O 3 layer. Also a ferroelectric microsystem obtained by this deposition method. Experiments show an improved fatigue resistance for such a microsystem.