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公开(公告)号：US20210198099A1
公开(公告)日：2021-07-01
申请号：US17057842
申请日：2019-06-19
申请人： LYNRED
发明人： Sylvain Lemettre , David Bunel
IPC分类号： B81B7/00
摘要： The invention concerns a hermetically sealed package forming a low pressure or vacuum enclosure, and receiving at least one component of imaging bolometer type. The hermetically sealed package includes a monolithic layer of a getter material capable of capturing gases present in the enclosure, the layer of getter material having a thickness in the range from 20 nanometers to 200 nanometers.
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公开(公告)号：US20220033250A1
公开(公告)日：2022-02-03
申请号：US17279006
申请日：2019-09-27
发明人： Sylvain Lemettre , David Bunel , Johan Moulin , Alain Bosseboeuf
摘要： A hermetic housing is disclosed (10a) for an optoelectronic component (11) or a MEMS device configured to form an enclosure (12) within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window (14) transparent for at least one wavelength of interest (λ); and a layer of a getter material (15a) configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1−P)*e_t
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公开(公告)号：US11305983B2
公开(公告)日：2022-04-19
申请号：US17279006
申请日：2019-09-27
发明人： Sylvain Lemettre , David Bunel , Johan Moulin , Alain Bosseboeuf
摘要： A hermetic housing is disclosed (10a) for an optoelectronic component (11) or a MEMS device configured to form an enclosure (12) within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window (14) transparent for at least one wavelength of interest (λ); and a layer of a getter material (15a) configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1−P)*e_t
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4.发明授权公开(公告)号：US10414647B2
公开(公告)日：2019-09-17
申请号：US15928008
申请日：2018-03-21
申请人： LYNRED
发明人： Jérôme Favier , David Bunel
摘要： A device having a microelectronic component housed in a hermetically sealed housing having a vacuum inner space, and including a getter that substantially traps only hydrogen, is inert to oxygen and/or to nitrogen, and is housed in said inner space. Each of the constituent parts of the device being likely to degas into the inner space is a mineral material.
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