公开(公告)号：US6127283A

公开(公告)日：2000-10-03

申请号：US432205

申请日：1999-11-02

申请人： Leah Gal-Or ,  Rony Goldner ,  Nina Sezin ,  Ala Pismany ,  David Brandon

发明人： Leah Gal-Or ,  Rony Goldner ,  Nina Sezin ,  Ala Pismany ,  David Brandon

IPC分类号： C25D13/02 ,  H01L41/24

CPC分类号： C25D13/02 ,  H01L41/317 ,  H01L41/43

摘要： An improved method for depositing ferroelectric particles on a surface of a substrate to form films or stand-alone bodies. The improvement is based on electrophoretic deposition (EPD) of ferroelectric films by using a tri-functional phosphate ester additive having a concentration less than 10 volume percent in the EPD suspension, without the need for addition of a binder. The method includes preparation of the suspension by washing and dispersing ferroelectric particles, for example, commercially available PZT powder, in a polar solvent such as ethanol, followed by addition of the phosphate ester additive to the suspension, and an ultrasound treatment. The suspension is used in EPD of the ferroelectric particles on a prepared substrate. Following EPD, the green film is dried and sintered at high temperature. Visual and physical examination of stand alone and patterned PZT deposited films show excellent quality obtained in manufacturing a diversity of piezoelectric products, featuring exceptionally high green film uniformity, thickness distribution, and reproducibility to within .+-.2 microns for 20 micrometer film thickness. The phosphate ester additive functions by improving stabilization and control of suspension characteristics and properties during the electrophoretic migration process, and by improving desired dimensions, characteristics, and electrical properties of the deposited green film. Thin or thick ferroelectric films, either as stand alone products, or formed on geometrically demanding patterned or non-patterned substrates are produced by using the method. The improved method is applicable to different ferroelectric particulate materials and to different substrates used for manufacturing piezoelectric elements and devices, in a cost effective manner.

摘要翻译： 一种用于在基板的表面上沉积铁电粒子以形成膜或独立体的改进方法。 通过在EPD悬浮液中使用浓度小于10体积％的三官能磷酸酯添加剂，而不需要添加粘合剂，改进是基于铁电体膜的电泳沉积（EPD）。 该方法包括通过在极性溶剂如乙醇中洗涤和分散铁电粒子，例如市售的PZT粉末，然后向悬浮液中加入磷酸酯添加剂和超声处理来制备悬浮液。 悬浮液用于制备的基板上的铁电粒子的EPD中。 在EPD之后，将绿膜干燥并在高温下烧结。 独立和图案化的PZT沉积膜的视觉和体检在制造多种压电产品时获得了极好的质量，其具有特别高的绿膜均匀性，厚度分布和重现性，在20微米厚度的+/- 2微米内。 磷酸酯添加剂通过改善在电泳迁移过程中的悬浮特性和性质的稳定和控制以及改善沉积的绿膜所需的尺寸，特性和电性能来起作用。 通过使用该方法制备作为独立产品或形成在几何要求的图案化或非图案化衬底上的薄或厚的铁电体膜。 该改进的方法可以以成本有效的方式适用于不同的铁电颗粒材料和用于制造压电元件和装置的不同基板。

公开(公告)号：US06479406B2

公开(公告)日：2002-11-12

申请号：US09732763

申请日：2000-12-11

申请人： Leah Gal-Or ,  Rony Goldner ,  Nina Sezin ,  Ala Pismany ,  David Brandon

发明人： Leah Gal-Or ,  Rony Goldner ,  Nina Sezin ,  Ala Pismany ,  David Brandon

IPC分类号： H01L21469

CPC分类号： C25D13/02 ,  H01L41/317 ,  H01L41/43

摘要： An improved method for depositing ferroelectric particles on a surface of a substrate to form films or stand-alone bodies. The improvement is based on electrophoretic deposition (EPD) of ferroelectric films by using a tri-functional phosphate ester additive having a concentration less than 10 volume percent in the EPD suspension, without the need for addition of a binder. The method includes preparation of the suspension by washing and dispersing ferroelectric particles, for example, commercially available PZT powder, in a polar solvent such as ethanol, followed by addition of the phosphate ester additive to the suspension, and an ultrasound treatment. The suspension is used in EPD of the ferroelectric particles on a prepared substrate. Following EPD, the green film is dried and sintered at high temperature. Visual and physical examination of stand alone and patterned PZT deposited films show excellent quality obtained in manufacturing a diversity of piezoelectric products, featuring exceptionally high green film uniformity, thickness distribution, and reproducibility to within ±2 microns for 20 micrometer film thickness. The phosphate ester additive functions by improving stabilization and control of suspension characteristics and properties during the electrophoretic migration process, and by improving desired dimensions, characteristics, and electrical properties of the deposited green film. Thin or thick ferroelectric films, either as stand alone products, or formed on geometrically demanding patterned or non-patterned substrates are produced by using the method. The improved method is applicable to different ferroelectric particulate materials and to different substrates used for manufacturing piezoelectric elements and devices, in a cost effective manner.

摘要翻译： 一种用于在基板的表面上沉积铁电粒子以形成膜或独立体的改进方法。 通过在EPD悬浮液中使用浓度小于10体积％的三官能磷酸酯添加剂，而不需要添加粘合剂，改进是基于铁电体膜的电泳沉积（EPD）。 该方法包括通过在极性溶剂如乙醇中洗涤和分散铁电粒子，例如市售的PZT粉末，然后向悬浮液中加入磷酸酯添加剂和超声处理来制备悬浮液。 悬浮液用于制备的基板上的铁电粒子的EPD中。 在EPD之后，将绿膜干燥并在高温下烧结。 对于独立和图案化的PZT沉积膜的视觉和物理检查，在制造多种压电产品时获得了极好的质量，其具有特别高的绿膜均匀性，厚度分布和重现性，在20微米厚的膜厚度范围内在±2微米内。 磷酸酯添加剂通过改善在电泳迁移过程中的悬浮特性和性质的稳定和控制以及改善沉积的绿膜所需的尺寸，特性和电性能来起作用。 通过使用该方法制备作为独立产品或形成在几何要求的图案化或非图案化衬底上的薄或厚的铁电体膜。 该改进的方法可以以成本有效的方式适用于不同的铁电颗粒材料和用于制造压电元件和装置的不同基板。