公开(公告)号：US20150346524A1

公开(公告)日：2015-12-03

申请号：US14817275

申请日：2015-08-04

申请人： LensVector Inc.

发明人： Bahram AFSHARI ,  Karen ASATRYAN ,  Peter P. CLARK ,  Tigran GALSTIAN ,  Michael J. NYSTROM ,  Vladimir PRESNIAKOV ,  Sergei YAKOVENKO ,  Armen ZOHRABYAN

IPC分类号： G02F1/13 ,  G01R1/07

CPC分类号： G02F1/133351 ,  G01R1/071 ,  G02F1/1309 ,  G09G3/006 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49771

摘要： Methods and apparatus for testing operation of a single or multiple tunable active optical device(s) operated by one or more driving electrodes are described. Test methods and apparatus are provided for device testing without necessarily requiring direct physical contact with the driving electrodes. Testing subjects devices to incident light along an optical path and to an external electric field applied to the device producing a dipolar charge distribution within the electrodes, causing the device to operate. The effect of device operation on incident light is optically sensed. The sensed effect is analyzed to identify device defects. Test methods and apparatus are provided for testing multiple unsingulated devices during fabrication employing a strip contact structure having contact strips connected to multiple devices and extending to wafer edges, such that singulating devices leaves portions of the strip contact structure exposed on device dice edges providing electrical contacts in use.

摘要翻译： 描述用于测试由一个或多个驱动电极操作的单个或多个可调谐有源光学器件的操作的方法和装置。 提供测试方法和装置用于器件测试，而不必要求与驱动电极直接物理接触。 测试设备沿着光学路径入射光并施加到施加到器件的外部电场，从而在电极内产生偶极电荷分布，使器件工作。 光学检测器件操作对入射光的影响。 分析检测到的效果以识别设备缺陷。 提供了测试方法和装置，用于在制造过程中测试多个不起毛的装置，使用具有连接到多个装置并且延伸到晶片边缘的接触条的带状接触结构，使得分离装置离开条形接触结构的部分，暴露在器件骰子边缘上， 正在使用。