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公开(公告)号:US06953559B2
公开(公告)日:2005-10-11
申请号:US10450123
申请日:2001-11-21
IPC分类号: C01B33/027 , C01B33/029 , H01L31/18 , C01B33/02
CPC分类号: C01B33/027 , C01B33/029 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要: The invention relates to a method for producing highly pure, granular silicon by decomposing a gas containing silicon in a procedure comprising at least two operating states, at least one state comprising the increased formation of nucleus particles from the decomposition of said gas containing silicon and at least one other state comprising the increased separation of the silicon with expansion of the diameter of the silicon granules. The invention also relates to the use of silicon produced in this way and to highly pure, granular silicon particles which are characterised by a coreless structure.
摘要翻译: 本发明涉及通过在包含至少两种操作状态的方法中分解含硅气体来生产高纯度颗粒状硅的方法,至少一种状态包括从所述含硅气体的分解增加形成的核粒子,以及在 至少一个其他状态包括随着硅颗粒直径的扩大而增加硅的分离。 本发明还涉及以这种方式制造的硅以及以无芯结构为特征的高纯度颗粒状硅颗粒的用途。