公开(公告)号：US12205894B2

公开(公告)日：2025-01-21

申请号：US17697074

申请日：2022-03-17

Applicant: MACRONIX INTERNATIONAL CO., LTD.

Inventor： Chin-Cheng Yang ,  Yun-Chu Lin

IPC: H01L23/528

Abstract: A routing pattern is provided. The routing pattern includes a first routing region, a second routing region and an interconnection region. The first routing region includes a plurality of first conductive lines extending along a first direction. The plurality of first conductive lines has a first pitch along a second direction perpendicular to the first direction. The second routing region includes a plurality of second conductive lines extending along the first direction. The plurality of second conductive lines has a second pitch along the second direction, and the second pitch is approximately equal to the first pitch. The interconnection region includes two body parts and a connecting part connecting to the body parts. The body parts are disposed separately along the first direction. A width of the connecting part along the second direction is smaller than a width of the body parts along the second direction.