公开(公告)号：US20220289631A1

公开(公告)日：2022-09-15

申请号：US17634160

申请日：2020-08-13

Applicant: MATERION CORPORATION

Inventor： Larry T. SMITH ,  Fritz C. GRENSING ,  Zan ASLETT ,  Robert E. KUSNER ,  Jeffrey R. CAMPBELL ,  Aaron B. SAYER ,  Kyung H. CHUNG ,  Gordon V. LU

IPC: C04B35/08 ,  C04B35/628 ,  C04B41/45 ,  C04B41/52

Abstract: A base plate containing a having a top and a bottom and comprising a beryllium oxide composition containing at least 95 wt % beryllium oxide and optionally fluorine/fluoride ion. The base plate demonstrates a clamping pressure of at least 133 kPa at a temperature of at least 600° C. and a bulk resistivity greater than 1×105 ohm-m at 800° C.