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公开(公告)号：US20140197500A1
公开(公告)日：2014-07-17
申请号：US14152085
申请日：2014-01-10
申请人： MEAS FRANCE
IPC分类号： G01N27/22
CPC分类号： G01N27/226 , G01N27/223 , G01N27/227 , G01N27/228
摘要： There is disclosed a capacitive sensor on a passivation layer of a semiconductor circuit such as an ASIC, and a method for manufacturing such sensor. The system and method may comprise: forming a bottom electrode layer and landing pad on a portion of the passivation layer located over active circuitry of the ASIC; forming a gas sensitive layer onto the bottom electrode layer and the landing pad; creating a via through the gas sensitive layer to expose a portion of the landing pad; forming a top electrode layer onto the gas sensitive layer, wherein the top electrode layer completely overlays a surface area of the bottom electrode layer, and wherein the forming process for the top electrode layer deposits a portion of the top electrode layer into the via hole, thereby forming an electrical connection between the top electrode layer and the landing pad.
摘要翻译： 公开了诸如ASIC的半导体电路的钝化层上的电容式传感器，以及用于制造这种传感器的方法。 该系统和方法可以包括：在位于ASIC的有源电路上的钝化层的一部分上形成底部电极层和着陆焊盘; 在底部电极层和着陆焊盘上形成气敏层; 通过气体敏感层产生通孔以暴露该着陆垫的一部分; 在气敏层上形成上电极层，其中顶电极层完全覆盖底电极层的表面区域，其中上电极层的形成工艺将顶电极层的一部分沉积到通孔中， 从而在顶部电极层和着陆焊盘之间形成电连接。
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公开(公告)号：US20200296806A1
公开(公告)日：2020-09-17
申请号：US16816999
申请日：2020-03-12
发明人： Romuald Gallorini , Mingjie Fan , Shaoyong Wang
摘要： An induction cooker including a plurality of stoves each having a transmitting coil and a driver driving the transmitting coil, and a controller controlling the driver of each of the stoves to generate a drive signal. The drive signal of each of the stoves is a periodically cyclic modulation signal sequence. The stoves are identifiable and distinguishable from each other by the periodically cyclic modulation signal sequences that are different for each of the stoves.
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公开(公告)号：US12010781B2
公开(公告)日：2024-06-11
申请号：US16816999
申请日：2020-03-12
发明人： Romuald Gallorini , Mingjie Fan , Shaoyong Wang
CPC分类号： H05B6/062 , H05B1/0266 , H05B6/1272
摘要： An induction cooker including a plurality of stoves each having a transmitting coil and a driver driving the transmitting coil, and a controller controlling the driver of each of the stoves to generate a drive signal. The drive signal of each of the stoves is a periodically cyclic modulation signal sequence. The stoves are identifiable and distinguishable from each other by the periodically cyclic modulation signal sequences that are different for each of the stoves.
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公开(公告)号：US09239310B2
公开(公告)日：2016-01-19
申请号：US14152085
申请日：2014-01-10
申请人： MEAS FRANCE
IPC分类号： H01L21/00 , G01N27/403 , G01N27/22
CPC分类号： G01N27/226 , G01N27/223 , G01N27/227 , G01N27/228
摘要： There is disclosed a capacitive sensor on a passivation layer of a semiconductor circuit such as an ASIC, and a method for manufacturing such sensor. The system and method may comprise: forming a bottom electrode layer and landing pad on a portion of the passivation layer located over active circuitry of the ASIC; forming a gas sensitive layer onto the bottom electrode layer and the landing pad; creating a via through the gas sensitive layer to expose a portion of the landing pad; forming a top electrode layer onto the gas sensitive layer, wherein the top electrode layer completely overlays a surface area of the bottom electrode layer, and wherein the forming process for the top electrode layer deposits a portion of the top electrode layer into the via hole, thereby forming an electrical connection between the top electrode layer and the landing pad.
摘要翻译： 公开了诸如ASIC的半导体电路的钝化层上的电容式传感器，以及用于制造这种传感器的方法。 该系统和方法可以包括：在位于ASIC的有源电路上的钝化层的一部分上形成底部电极层和着陆焊盘; 在底部电极层和着陆焊盘上形成气敏层; 通过气体敏感层产生通孔以暴露该着陆垫的一部分; 在气敏层上形成上电极层，其中顶电极层完全覆盖底电极层的表面区域，其中上电极层的形成工艺将顶电极层的一部分沉积到通孔中， 从而在顶部电极层和着陆焊盘之间形成电连接。
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