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公开(公告)号：US12265335B2
公开(公告)日：2025-04-01
申请号：US17933968
申请日：2022-09-21
Applicant: MICRON TECHNOLOGY, INC.
Inventor： Kazuko Yamashita , Toshiharu Nishiyama
Abstract: According to one or more embodiments of the disclosure, an alignment-overlay mark is provided. The alignment-overlay mark includes a pair of first marks and a plurality of second marks. The first marks extend in a first direction and are arranged in parallel to each other in a second direction. The second direction is perpendicular to the first direction. The second marks are between the first marks, extend in the second direction and are arranged in parallel to each other in the first direction.
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