公开(公告)号：US20210305026A1

公开(公告)日：2021-09-30

申请号：US16831186

申请日：2020-03-26

Applicant: MING CHI UNIVERSITY OF TECHNOLOGY

Inventor： Jang-Hsing HSIEH ,  Chuan LI ,  Nima BOLOUKI ,  Himanshu MISHRA

IPC: H01J37/32 ,  H01J37/24 ,  H05H1/24

Abstract: A plasma polymerization apparatus is provided for forming a polymerization coating on an inner surface of an object. The plasma polymerization apparatus comprises a chamber, a gas supply, a monomer source, a first electrode, a second electrode, a power source, and a metal foil. The gas supply is connected to the chamber for filling the chamber with a working gas. The monomer source is connected to the chamber for providing a vaporized monomer material into the chamber. The first electrode is located at a first side of the chamber. The second electrode is located at a second side of the chamber. The power source is electrically connected to the first electrode and the second electrode for generating plasma. The metal foil is wrapped around an outer surface of the object and placed between the first electrode and the second electrode. A plasma polymerization method is also provided.