公开(公告)号：US20210068242A1

公开(公告)日：2021-03-04

申请号：US16827215

申请日：2020-03-23

Applicant: MING CHI UNIVERSITY OF TECHNOLOGY

Inventor： Jang-Hsing HSIEH ,  Shu-Chien CHANG ,  Shi-Wei HUANG

IPC: H05H1/24

Abstract: An electrode component for generating large area atmosphere pressure plasma is provided. The electrode component comprises a first transparent insulation substrate, a first transparent electrode pattern, a second transparent electrode pattern, and a second transparent insulation substrate. The first transparent insulation substrate has a first thickness. The first transparent electrode pattern and the second transparent electrode pattern are formed on the upper surface of the first transparent insulation substrate and has a gap therebetween. The second transparent insulation substrate has a second thickness and covers the first transparent electrode pattern and the second transparent electrode pattern. The first thickness is greater than the second thickness in order to form atmospheric pressure plasma above the second transparent insulation substrate.