公开(公告)号：US20220229211A1

公开(公告)日：2022-07-21

申请号：US17569256

申请日：2022-01-05

Applicant: MITUTOYO CORPORATION

Inventor： Aimin SHA ,  Shiro IGASAKI

IPC: G02B3/14

Abstract: An image detection device includes an image detection optical system including a liquid resonant lens; an image detector configured to detect an image corresponding to a detection phase of a drive signal through the image detection optical system; a range determination unit configured to determine a first half or a second half of a cycle of the drive signal as a designated allowable range of the detection phase based on whether a phase delay shown by a variation waveform of a focus position is positive or negative; a detection phase setting unit configured to set the detection phase in the designated allowable range; and a detection control unit configured to control an image-detection timing by the image detector to a timing offset from the detection phase by an angle corresponding to the phase delay.