公开(公告)号：US20140367560A1

公开(公告)日：2014-12-18

申请号：US14284902

申请日：2014-05-22

Applicant: MITUTOYO CORPORATION

Inventor： Fujio MAEDA

IPC: G01D5/347

CPC classification number: G01D5/34707 ,  G01D5/34746

Abstract: A scale for a photoelectric encoder includes a scale substrate and a reflection film formed at a predetermined pitch on the scale substrate. A surface of the reflection film forms a reflection surface. A low-reflection surface is formed by etching the scale substrate between reflection films. Accordingly, a scale can be provided which is lower in cost and has favorable yield rates.

Abstract translation: 光电编码器的标尺包括刻度尺基板和在刻度尺基板上以预定间距形成的反射膜。 反射膜的表面形成反射面。 通过在反射膜之间蚀刻刻度尺基板来形成低反射面。 因此，可以提供成本较低并且具有良好收率的标尺。