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公开(公告)号：US10663273B2
公开(公告)日：2020-05-26
申请号：US15859924
申请日：2018-01-02
Applicant: MITUTOYO CORPORATION
Inventor： Masahiro Sakamoto , Yoshikazu Ooyama , Masato Takizawa , Koji Takesako
Abstract: A coordinate measuring machine includes: a table and a column which are configured to relatively move in a predetermined moving direction; a guide surface formed on the table and having a guide region and a drive region extending in the moving direction in parallel to each other; at least one air pad formed to the column and facing the guide region; and a drive roller formed to the column and rolling on the drive region.
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