公开(公告)号：US20150143708A1

公开(公告)日：2015-05-28

申请号：US14554608

申请日：2014-11-26

Applicant: MITUTOYO CORPORATION

Inventor： Takashi NODA ,  Hiromi DEGUCHI ,  Shoichi TODAKA

IPC: G01B5/20 ,  G01B5/008

CPC classification number: G01B5/20 ,  G01B5/008 ,  G01B21/04

Abstract: Stylus head displacer displaces a stylus head on a first measurement path. A path definer defines the first measurement path. A displacement controller controls the stylus head displacer such that the stylus head displaces along the first measurement path. A position detector detects a position of the stylus head. A depression amount detector detects the depression amount of the stylus head. A measurement results memory stores the position and amount of depression of the stylus head. The depression amount detector outputs an error signal when detecting a measurement error. The displacement controller stops displacement of the stylus head in response to the error signal and displaces the stylus head to a starting point of the first measurement path, and controls the stylus head displacer such that the stylus head is displaced from the starting point to an end point of the first measurement path with a fixed depression amount.

Abstract translation: 触针头置换器置换第一测量路径上的触针头。 路径定义器定义第一测量路径。 位移控制器控制触针头置换器，使得触针头沿着第一测量路径移位。 位置检测器检测触针头的位置。 抑制量检测器检测触针头的凹陷量。 测量结果存储器存储触控头的凹陷的位置和量。 当检测到测量误差时，抑制量检测器输出错误信号。 位移控制器响应于误差信号停止触针头的位移，并将触针头移动到第一测量路径的起点，并且控制触笔头置换器，使得触针头从起始点移动到末端 具有固定下压量的第一测量路径的点。