Abstract:
Provided is an image measurement system including: a placement portion on which a measurement object is placed; an imaging unit configured to be relatively movable with respect to the placement portion; a movement control unit that switches between a high-speed movement mode and a low-speed movement mode and allows the imaging unit to relatively move with respect to the placement portion; and an imaging control unit that captures instantaneous image information by the imaging unit on the basis of switching to the low-speed movement mode.
Abstract:
A measuring apparatus of the present invention includes a stage on which a measured object is placed, a measurement head having an information obtainer obtaining an image of the object, and a vertical driver supporting the measurement head so as to allow movement in a vertical direction. The vertical driver includes a counterbalance mechanism having a hanger of the measurement head, a pulley winding up and withdrawing the hanger by rotation, a spring increasing elastic force by stretching the spring when the measurement head displaces downward, and a cam rotating in conjunction with the pulley and having a cam shape decreasing rotational torque provided to the pulley by the elastic force as a stretching amount of the spring increases.
Abstract:
A moving speed control method of an optical element switching device including a fixing member, a moveable member having a plurality of recess portions configured to hold one or more optical elements, a driving device supported to the fixing member and configured to move the moveable member, and an engaging mechanism supported to the fixing member and configured to be engaged to the recess portion to thereby position each of the one or more optical elements on an optical axis, the moving speed control method includes: starting to move the moveable member from a state where the recess portion is engaged to the engaging mechanism; accelerating a moving speed of the moveable member; decelerating the moving speed when the engaging mechanism is to be engaged to the next recess portion; and making the moving speed zero when the engaging mechanism is engaged to the recess portion.
Abstract:
A moving speed control method of an optical element switching device including a fixing member, a moveable member having a plurality of recess portions configured to hold one or more optical elements, a driving device supported to the fixing member and configured to move the moveable member, and an engaging mechanism supported to the fixing member and configured to be engaged to the recess portion to thereby position each of the one or more optical elements on an optical axis, the moving speed control method includes: starting to move the moveable member from a state where the recess portion is engaged to the engaging mechanism; accelerating a moving speed of the moveable member; decelerating the moving speed when the engaging mechanism is to be engaged to the next recess portion; and making the moving speed zero when the engaging mechanism is engaged to the recess portion.