公开(公告)号：US20230384495A1

公开(公告)日：2023-11-30

申请号：US18233012

申请日：2023-08-11

Applicant: MITUTOYO CORPORATION

Inventor： Toshihiko AOKI ,  Kosaku MIYAKE

IPC: G02B5/18

CPC classification number: G02B5/1814 ,  G02B5/1852 ,  G02B2005/1804

Abstract: A grating part includes a first transparent substrate having an optical grating on a surface thereof, a second transparent substrate having an optical grating on a surface thereof, and a spacer positioned between the first transparent substrate and the second transparent substrate, the spacer bonding the first transparent substrate and the second transparent substrate.

公开(公告)号：US20210262833A1

公开(公告)日：2021-08-26

申请号：US17174763

申请日：2021-02-12

Applicant: MITUTOYO CORPORATION

Inventor： Kosaku MIYAKE ,  Toshihiko AOKI

IPC: G01D5/347

Abstract: A scale includes a base material, scale patterns arranged at a predetermined periodicity on a main surface of the base material, and a fluorine film that covers the scale patterns and is at least partly a monomolecular fluorine compound.