公开(公告)号：US20180252302A1

公开(公告)日：2018-09-06

申请号：US15906558

申请日：2018-02-27

Applicant: MITUTOYO CORPORATION

Inventor： Yoshiharu KIMURA ,  Yoshikazu OOYAMA ,  Kazuaki KAWARAI

IPC: F16H19/02 ,  F16M13/02 ,  F15B15/14 ,  G01B5/012 ,  G01B5/20

CPC classification number: F16H19/025 ,  F15B15/14 ,  F16H2712/06 ,  F16M13/022 ,  F16M2200/04 ,  G01B5/008 ,  G01B5/012 ,  G01B5/20 ,  G01B11/005 ,  G01B11/24

Abstract: A lifting drive device for a Z-axis spindle inserted into a guide tube and guided via an air layer including: a wire extending upward from the inside of the Z-axis spindle and having its upper end supported by the guide tube, a piston connected to an lower end of the wire, a cylinder that moves up-and-down relative to the piston by an air supplied to a cylinder chamber provided to the Z-axis spindle and partitioned by the piston, a driving roller provided to the guide tube and in contact with the surface of the Z-axis spindle, and a motor for driving the driving roller, so as to achieve highly precise linear movement and swift lifting of the Z-axis spindle guided by an air bearing and to be suitable for structural simplification, weight reduction and vibration countermeasures.