Optical sensor and geometry measurement apparatus

    公开(公告)号:US11965733B2

    公开(公告)日:2024-04-23

    申请号:US17721858

    申请日:2022-04-15

    CPC classification number: G01B11/24

    Abstract: An optical sensor includes a radiation part that irradiates an object to be measured with laser light, an imaging part that receives laser light reflected by the object to be measured and captures an image of the object to be measured, a first driving part that moves the radiation part in a radiation direction of laser light to the object to be measured, and a second driving part that moves the imaging part in a reflection direction of laser light from the object to be measured and an orthogonal direction to the reflection direction.

    OPTICAL SENSOR AND GEOMETRY MEASUREMENT APPARATUS

    公开(公告)号:US20220404142A1

    公开(公告)日:2022-12-22

    申请号:US17721858

    申请日:2022-04-15

    Abstract: An optical sensor includes a radiation part that irradiates an object to be measured with laser light, an imaging part that receives laser light reflected by the object to be measured and captures an image of the object to be measured, a first driving part that moves the radiation part in a radiation direction of laser light to the object to be measured, and a second driving part that moves the imaging part in a reflection direction of laser light from the object to be measured and an orthogonal direction to the reflection direction.

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