公开(公告)号：US07667944B2

公开(公告)日：2010-02-23

申请号：US11823978

申请日：2007-06-29

Applicant: Mahmood Naim

Inventor： Mahmood Naim

IPC: H01T23/00

CPC classification number: H02N13/00 ,  H01J2237/2007 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/6875 ,  H01L21/68757 ,  Y10T279/23

Abstract: The present invention discloses an electrostatic chuck for clamping work substrates, said chuck comprising three layers, where the dielectric constant of included non-conductive layers is selected to provide overall lower capacitance to the chuck. In the chuck assembly of the present invention, the top dielectric layer that is in contact with a substrate, such as, a wafer, has a dielectric constant that is preferably greater than about 5, with a resistivity that is preferably greater than about 1E6 ohm.m, whereas the bottom dielectric layer has a dielectric constant that is preferably less than about 5 and a resistivity that is preferably greater than about 1E10 ohm.m. The intermediate layer preferably has a conductive layer where the resistivity is less than about 1 ohm.m.

Abstract translation: 本发明公开了一种用于夹持工作基板的静电卡盘，所述卡盘包括三层，其中选择所包括的非导电层的介电常数以向卡盘提供总体较低的电容。 在本发明的卡盘组件中，与衬底（例如晶片）接触的顶部电介质层的介电常数优选大于约5，电阻率优选大于约1E6欧姆 而底部电介质层的介电常数优选小于约5，电阻率优选大于约1E10欧姆·米。 中间层优选具有电阻率小于约1欧姆·米的导电层。

公开(公告)号：US20090002913A1

公开(公告)日：2009-01-01

申请号：US11823978

申请日：2007-06-29

Applicant: Mahmood Naim

Inventor： Mahmood Naim

IPC: H02N13/00 ,  B23B5/22 ,  H01T23/00

CPC classification number: H02N13/00 ,  H01J2237/2007 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/6875 ,  H01L21/68757 ,  Y10T279/23

Abstract: The present invention discloses an electrostatic chuck for clamping work substrates, said chuck comprising three layers, where the dielectric constant of included non-conductive layers is selected to provide overall lower capacitance to the chuck. In the chuck assembly of the present invention, the top dielectric layer that is in contact with a substrate, such as, for example, a wafer, has a dielectric constant that is preferably greater than about 5, with a resistivity that is preferably greater than about 1E6 ohm.m, whereas the bottom dielectric layer has a dielectric constant that is preferably less than about 5 and a resistivity that is preferably greater than about 1E10 ohm.m. The intermediate layer preferably has a conductive layer where the resistivity is less than about 1 ohm.m. The electrostatic chuck may be bonded to heat sinks coated with anti-arc dielectrics. The heat sink can also be used as an RF electrode. The heat sink may have provisions for coolants and gas channels to feed a cooling gas to the backside of a wafer. The heat sink may have feed thrus to power the segmented electrodes in the electrostatic chuck. The passages for the feed thrus, gas feed holes and lift pins may be lined with ceramics or polymers to prevent any discharge to the heat sink. The electrostatic chuck is for clamping work substrates like Si, GaAs, SiO2, etc. used in semiconductor tools.

Abstract translation: 本发明公开了一种用于夹持工作基板的静电卡盘，所述卡盘包括三层，其中选择所包括的非导电层的介电常数以向卡盘提供总体较低的电容。 在本发明的卡盘组件中，与衬底（例如晶片）接触的顶部电介质层的介电常数优选大于约5，电阻率优选大于 约1E6欧姆·米，而底部介电层的介电常数优选小于约5，电阻率优选大于约1E10欧姆·米。 中间层优选具有电阻率小于约1欧姆·米的导电层。 静电吸盘可以结合到涂有抗电弧电介质的散热片上。 散热器也可以用作RF电极。 散热器可以设置冷却剂和气体通道，以将冷却气体供给到晶片的背面。 散热器可能具有供给静电卡盘中的分段电极的动力。 进料口，气体供给孔和提升销的通道可以衬有陶瓷或聚合物，以防止任何排放到散热器。 静电卡盘用于夹紧半导体工具中使用的Si，GaAs，SiO2等工作基板。

公开(公告)号：US06754062B2

公开(公告)日：2004-06-22

申请号：US10085571

申请日：2002-02-27

Applicant: Joseph Logan ,  John R. Miller ,  Mahmood Naim ,  Robert E. Tompkins

Inventor： Joseph Logan ,  John R. Miller ,  Mahmood Naim ,  Robert E. Tompkins

IPC: H01T2300

CPC classification number: H02N13/00

Abstract: The invention is a hybrid chuck for securing workpieces with an electrostatic charge. The hybrid chuck includes a dielectric base for supporting the hybrid chuck. The dielectric base has a top surface and a conductive layer covers at least a portion of the top surface of the dielectric base. The conductive layer is conductive for receiving a current that creates an electrostatic charge and is non-metallic for maintaining the electrostatic charge without significant eddy current losses in the presence of dynamic electromagnetic fields. The top working surface covers the conductive layer and is flat for holding workpieces upon the receiving of the current to create the electrostatic charge in the conductive layer.

Abstract translation: 本发明是用于用静电荷固定工件的混合卡盘。 混合卡盘包括用于支撑混合卡盘的电介质基座。 电介质基底具有顶表面，并且导电层覆盖电介质基底的顶表面的至少一部分。 导电层是导电的，用于接收产生静电电荷的电流，并且是非金属的，用于在存在动态电磁场的情况下保持静电电荷而没有显着的涡流损耗。 顶部工作表面覆盖导电层，并且在接收电流时保持工件是平坦的，以在导电层中产生静电电荷。