公开(公告)号：US20090229125A1

公开(公告)日：2009-09-17

申请号：US12400440

申请日：2009-03-09

申请人： Maki KATO ,  Masaki Ohsumi ,  Yoshinori Tagawa ,  Kazuhiro Asai ,  Masahiko Kubota ,  Tamaki Sato ,  Akihiko Okano

发明人： Maki KATO ,  Masaki Ohsumi ,  Yoshinori Tagawa ,  Kazuhiro Asai ,  Masahiko Kubota ,  Tamaki Sato ,  Akihiko Okano

IPC分类号： B21D53/76

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/49401

摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and including a flow passage communicating with the ejection outlet is provided. The manufacturing method includes preparing a substrate on which a first flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the first flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer formed of a negative photosensitive resin material; exposing to light a portion of the first layer for constituting the ejection outlet forming member; providing a second layer, on the first layer, formed of a negative photosensitive resin material; exposing to light a portion of the second layer for constituting a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first layer and the exposed second layer on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming a part of the flow passage and the ejection outlet by removing a non-exposed portion of the first layer and the non-exposed portion of the second layer above the substrate; and forming the flow passage by removing the solid layer.

摘要翻译： 提供了一种液体喷射头的制造方法，该液体喷射头包括具有用于喷射液体的喷射出口并且包括与喷射口连通的流动通道的喷射出口形成部件。 该制造方法包括：准备基板，在基板上形成有形成流路的壁的一部分的第一流路壁形成部件和流路的一部分的形状的固体层彼此接触，其中，第一流路 壁形成构件具有与基底表面大致相等的固体层的高度; 提供由负性感光性树脂材料形成的第一层; 暴露于构成喷射出口形成构件的第一层的一部分; 在第一层上形成第二层，由负的感光性树脂材料形成; 暴露于第二层的一部分，用于构成用于形成流道的壁的另一部分的第二流动通道壁形成构件; 将暴露的第一层和暴露的第二层放置在固体层和第一流路壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一层的未暴露部分和第二层的未暴露部分来形成流动通道和喷射出口的一部分; 并通过去除固体层形成流动通道。