公开(公告)号：US20120325147A1

公开(公告)日：2012-12-27

申请号：US13608586

申请日：2012-09-10

申请人： Marcel SIMOR ,  Ales FIALA

发明人： Marcel SIMOR ,  Ales FIALA

IPC分类号： C23C16/50 ,  C23C16/54

摘要： An apparatus for depositing a polymer layer containing nanomaterial on a substrate material includes a carrier for carrying the substrate material; a transport structure for providing a polymerization material near a surface of the substrate material and conducting a gas flow near the surface of the substrate material with the gas flow comprising a nanomaterial; and a plasma chamber wherein a plasma electrode structure is arranged for depositing the polymer layer containing nanomaterial on the surface of the substrate material by applying a plasma polymerization process.

摘要翻译： 用于在衬底材料上沉积含有纳米材料的聚合物层的装置包括用于承载衬底材料的载体; 用于在衬底材料的表面附近提供聚合材料并且在衬底材料的表面附近通过包含纳米材料的气流传导气流的传送结构; 以及等离子体室，其中布置等离子体电极结构，用于通过施加等离子体聚合方法在衬底材料的表面上沉积含有纳米材料的聚合物层。