公开(公告)号：US20120044474A1

公开(公告)日：2012-02-23

申请号：US13075929

申请日：2011-03-30

申请人： Markus Hauf ,  Severin Waldis ,  Wilfried Noell ,  Yves Petremend ,  Marco Jassman ,  Lothar Kulzer ,  Caglar Ataman

发明人： Markus Hauf ,  Severin Waldis ,  Wilfried Noell ,  Yves Petremend ,  Marco Jassman ,  Lothar Kulzer ,  Caglar Ataman

IPC分类号： G03B27/54 ,  G03B27/32 ,  G02B7/182

CPC分类号： G03F7/7015 ,  G02B7/1815 ,  G02B26/0816 ,  G02B26/0833 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70291 ,  G03F7/70891

摘要： An optical module is used to guide an EUV radiation beam. The optical module has a chamber that can be evacuated and at least one mirror accommodated in the chamber. The mirror has a plurality of individual mirrors, the reflection faces of which complement one another to form an overall mirror reflection face. A support structure is in each case mechanically connected via a thermally conductive portion to a mirror body of the respective individual mirror. At least some of the mirror bodies have an associated actuator for the predetermined displacement of the mirror body relative to the support structure in at least one degree of freedom. The thermally conductive portions are configured to dissipate a thermal power density of at least 1 kW/m2 absorbed by the mirror bodies to the support structure. In one aspect of the optical module, an integrated electronic displacement circuit is associated with each of the displaceable individual mirrors in spatial proximity, and a central control device has a signal connection with the integrated electronic displacement circuits of the displaceable individual mirrors. The result is an optical module, with which an illumination optical system can be constructed, which, even with a non-negligible thermal load on the individual mirrors, ensures a high EUV radiation throughput.

摘要翻译： 光学模块用于引导EUV辐射束。 光学模块具有能够抽真空的腔室和容纳在腔室中的至少一个反射镜。 反射镜具有多个单独的反射镜，其反射面相互补充以形成整体的镜面反射面。 在每种情况下，支撑结构通过导热部分机械连接到各个反射镜的镜体。 至少一些镜体具有相关联的致动器，用于在至少一个自由度中相对于支撑结构预定位移镜体。 导热部分被配置为将由镜体吸收的至少1kW / m 2的热功率密度消散到支撑结构。 在光学模块的一个方面，集成电子位移电路与空间接近的每个可移动的独立反射镜相关联，并且中央控制装置具有与可移动的各个反射镜的集成电子位移电路的信号连接。 结果是可以构造照明光学系统的光学模块，其甚至在各个反射镜上具有不可忽视的热负载，确保高的EUV辐射通量。