公开(公告)号：US20050197046A1

公开(公告)日：2005-09-08

申请号：US11063997

申请日：2005-02-24

申请人： Masahiro Aoyagi ,  Aki Nakajo ,  Hirofumi Tsuchiyama ,  Shinobu Nakamura

发明人： Masahiro Aoyagi ,  Aki Nakajo ,  Hirofumi Tsuchiyama ,  Shinobu Nakamura

IPC分类号： B24B1/00 ,  B24B37/00 ,  B24B49/00 ,  H01L21/304

CPC分类号： B24B37/005 ,  B24B49/03

摘要： Setting a polishing rate and a polishing time in chemical mechanical polishing can be performed with high accuracy by considering a product wafer of an object to be polished, and an instrumental error between apparatuses to be used, etc. By using, as a calculating formula, a formula well approximating a portion of a curve representing a state of chemical mechanical polishing on a side showing a target polishing amount, the polishing rate and the polishing time can be set with high accuracy according to a state of chemical mechanical polishing for actually polishing a product wafer. In the calculating formula, a parameter “A” relating to a film property of a film of an object to be polished, a parameter “B” relating to a roughness state of a film surface, and a parameter “C” relating to an instrumental error differential between apparatuses of a chemical mechanical polishing apparatus are joined by operators.

摘要翻译： 通过考虑待抛光对象物的产品晶片和待使用的装置之间的仪器误差等，可以高精度地进行化学机械抛光中的抛光速度和抛光时间的设定。通过使用作为计算公式， 可以根据实际研磨的化学机械抛光的状态，高精度地设定好近似于表示化学机械研磨状态的曲线部分的公式，该曲线表示目标研磨量，抛光速度和研磨时间 产品晶圆。 在计算式中，与被研磨对象物的膜的膜特性，膜表面的粗糙状态相关的参数“B”以及与仪器的粗糙状态有关的参数“C”的参数“A” 化学机械抛光装置的装置之间的误差差别由操作者连接起来。

公开(公告)号：US07234998B2

公开(公告)日：2007-06-26

申请号：US11063997

申请日：2005-02-24

申请人： Masahiro Aoyagi ,  Aki Nakajo ,  Hirofumi Tsuchiyama ,  Shinobu Nakamura

发明人： Masahiro Aoyagi ,  Aki Nakajo ,  Hirofumi Tsuchiyama ,  Shinobu Nakamura

IPC分类号： B24B49/00

CPC分类号： B24B37/005 ,  B24B49/03

摘要： Setting a polishing rate and a polishing time in chemical mechanical polishing can be performed with high accuracy by considering a product wafer of an object to be polished, and an instrumental error between apparatuses to be used, etc. By using, as a calculating formula, a formula well approximating a portion of a curve representing a state of chemical mechanical polishing on a side showing a target polishing amount, the polishing rate and the polishing time can be set with high accuracy according to a state of chemical mechanical polishing for actually polishing a product wafer. In the calculating formula, a parameter “A” relating to a film property of a film of an object to be polished, a parameter “B” relating to a roughness state of a film surface, and a parameter “C” relating to an instrumental error differential between apparatuses of a chemical mechanical polishing apparatus are joined by operators.

摘要翻译： 通过考虑待抛光对象物的产品晶片和待使用的装置之间的仪器误差等，可以高精度地进行化学机械抛光中的抛光速度和抛光时间的设定。通过使用作为计算公式， 可以根据实际研磨的化学机械抛光的状态，高精度地设定好近似于表示化学机械研磨状态的曲线部分的公式，该曲线表示目标研磨量，抛光速度和研磨时间 产品晶圆。 在计算式中，与被研磨对象物的膜的膜特性，膜表面的粗糙状态相关的参数“B”以及与仪器的粗糙状态有关的参数“C”的参数“A” 化学机械抛光装置的装置之间的误差差别由操作者连接起来。

公开(公告)号：US06665123B2

公开(公告)日：2003-12-16

申请号：US10151041

申请日：2002-05-21

申请人： Aki Nakajo ,  Makoto Iida ,  Hiroki Kuramoto ,  Masakazu Ogawa ,  Tatsumi Hasebe ,  Yoshie Kodera ,  Sadayauki Nishimura

发明人： Aki Nakajo ,  Makoto Iida ,  Hiroki Kuramoto ,  Masakazu Ogawa ,  Tatsumi Hasebe ,  Yoshie Kodera ,  Sadayauki Nishimura

IPC分类号： G02B2714

CPC分类号： G02B27/102 ,  G02B27/1073 ,  G02B27/149

摘要： In a projector, the precision of color synthesis is improved and the generation of vertical stripes in the projected image is suppressed by a dichroic prism used for color synthesis that employs at least the following aspects. (1) The dichroic prism is formed using triangular prisms, in which projections or grooves are provided that have two faces parallel to two pasted faces of the triangular prisms, the projections or grooves being integrally injection-molded on faces of the triangular prisms that are substantially perpendicular to the light beam (i.e., the faces through which no light beam passes); (2) the dichroic prism is positioned using marks on the pasted faces of the triangular prisms; or (3) the dichroic prism is formed by engaging triangular prisms in which recesses or projections are formed.

摘要翻译： 在投影仪中，颜色合成的精度得到改善，并且通过至少采用以下方面的用于颜色合成的二向色棱镜来抑制投影图像中的垂直条纹的产生。 （1）二向色棱镜由三角棱镜形成，其中提供有两个平行于三角棱镜的两个表面的凸起或凹槽，所述突起或凹槽一体地注塑在三角棱镜的表面上 基本上垂直于光束（即，没有光束通过的面）; （2）使用三角棱镜的粘贴面上的标记来定位二向色棱镜; 或（3）二向色棱镜通过接合形成凹部或凸起的三角棱镜而形成。