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1.发明申请Probe Storage Container, Prober Apparatus, Probe Arranging Method and Manufacturing Method of Probe Storage Container 有权探头存储容器，探测仪器，探头布置方法和探头存储容器的制造方法公开(公告)号：US20080204058A1
公开(公告)日：2008-08-28
申请号：US12027644
申请日：2008-02-07
CPC分类号： G01R1/06705 , Y10T29/49826
摘要： An object of the present invention relates to an arrangement of a manufactured probe in a prober apparatus without being exposed to an atmospheric air.The present invention relates to a probe storage container which can supply a probe in a prober apparatus without being exposed to an atmospheric air. Preferably, the probe is stored in the probe storage container by removing an oxide film in a leading end portion of the probe in accordance with a dry treatment using an ion source or the like, without being exposed to the atmospheric air. In accordance with the present invention, it is possible to replace and attach the probe with respect to the prober apparatus without being exposed to the atmospheric air, and it is possible to avoid a formation of the oxide film on a surface of the probe. Further, a worker attaching the probe to the prober apparatus can work without being directly in contact with the probe, and it is possible to prevent the leading end portion of the probe from being broken. Accordingly, it is possible to stably measure an electric characteristic of a semiconductor device or the like on the wafer.
摘要翻译： 本发明的一个目的涉及一种制造的探针在探测设备中的布置，而不暴露于大气中。 探针存储容器本发明涉及一种探针存储容器，其可以在探测设备中提供探针而不暴露于大气中。 优选地，通过根据使用离子源等的干法处理而不暴露于大气中，通过在探针的前端部分除去氧化膜来将探针存储在探针存储容器中。 根据本发明，可以相对于探针装置替换和附接探针而不暴露于大气中，并且可以避免在探针的表面上形成氧化膜。 此外，将探头附接到探测器装置的工作者可以在不直接与探针接触的情况下工作，并且可以防止探针的前端部分破裂。 因此，可以稳定地测量晶片上的半导体器件等的电特性。
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