公开(公告)号：US5420416A

公开(公告)日：1995-05-30

申请号：US160212

申请日：1993-12-02

申请人： Masanori Iida ,  Hiroyuki Asakura ,  Tetuji Miwa

发明人： Masanori Iida ,  Hiroyuki Asakura ,  Tetuji Miwa

IPC分类号： G02B6/293 ,  G01J3/18 ,  G02B6/34 ,  G02B26/08 ,  G02B27/62 ,  G01J1/20

CPC分类号： G02B6/4246 ,  G01J3/18 ,  G02B6/2931 ,  G02B6/29314 ,  G02B6/29332 ,  G02B6/2938 ,  G02B6/29395

摘要： An input light beam is applied to a diffraction element. The diffraction element is moved relative to a path of the input light beam while the input light beam is diffracted by the diffraction element and is thereby made into a diffracted light beam traveling from the diffraction element. A portion of the diffracted light beam is detected, and an intensity of the received diffracted light beam is also detected. In addition, a peak of the detected intensity of the received diffracted light beam is detected while the diffraction element is moved relative to the path of the input light beam. A position of the diffraction element is detected at which the detected peak of the detected intensity occurs. The position of the diffraction element is controlled on the basis of the detected position at which the detected peak of the detected intensity occurs.

摘要翻译： 输入光束被施加到衍射元件。 衍射元件相对于输入光束的路径移动，同时输入光束被衍射元件衍射，从而被制成从衍射元件行进的衍射光束。 检测衍射光束的一部分，并且还检测接收的衍射光束的强度。 此外，当衍射元件相对于输入光束的路径移动时，检测接收到的衍射光束的检测强度的峰值。 检测出检测出的强度的检测峰出现的衍射元件的位置。 基于检测到的检测到的峰值出现的检测位置来控制衍射元件的位置。