公开(公告)号：US06805003B2

公开(公告)日：2004-10-19

申请号：US09962346

申请日：2001-09-26

申请人： Masatoshi Ueki ,  Takio Kojima ,  Yoshinori Tsujimura ,  Kouichi Ikawa ,  Yoshihiko Kohmura ,  Takafumi Oshima

发明人： Masatoshi Ueki ,  Takio Kojima ,  Yoshinori Tsujimura ,  Kouichi Ikawa ,  Yoshihiko Kohmura ,  Takafumi Oshima

IPC分类号： G01F168

CPC分类号： G01F1/6845

摘要： A mass flow sensor includes a semiconductor substrate 1, an insulating thin film 2, heaters 311 and 312, temperature measurement resistors 321 and 322, and a protective layer 4. The heaters 311 and 312 are formed on the surface of the insulating thin film 2, and are provided adjacently such that the heater 311 is provided upstream the heater 312 and the heater 312 is provided downstream the heater 311. A cavity 5 is formed below the heaters 311 and 312, and the heaters are thermally insulated from the remaining portion of the semiconductor substrate. The temperature measurement resistors 321 and 322 are formed on the top surface of the insulating thin film 2, and are provided at opposite sides of the heaters 311 and 312, such that the resistors are aligned with respect to the flow passage of a fluid. In the mass flow sensor and the mass flowmeter including the sensor, the flow rate and flow direction of a fluid can be detected by means of merely the heaters 311 and 312, which are active elements. Therefore, the sensor and the flowmeter exhibits high-speed response with respect to change in the flow rate of the fluid.

摘要翻译： 质量流量传感器包括半导体衬底1，绝缘薄膜2，加热器311和312，温度测量电阻321和322以及保护层4.加热器311和312形成在绝缘薄膜2的表面上 并且相邻地设置，使得加热器311设置在加热器312的上游，并且加热器312设置在加热器311的下游。空腔5形成在加热器311和312的下方，并且加热器与剩余部分 半导体衬底。 温度测量电阻器321和322形成在绝缘薄膜2的顶表面上，并且设置在加热器311和312的相对侧，使得电阻器相对于流体的流动通道对准。 在包括传感器的质量流量传感器和质量流量计中，流体的流速和流动方向可以仅通过作为有源元件的加热器311和312来检测。 因此，传感器和流量计相对于流体的流量变化表现出高速响应。