公开(公告)号：US20080299311A1

公开(公告)日：2008-12-04

申请号：US12168532

申请日：2008-07-07

Applicant: Max SHTEIN ,  Stephen R. Forrest

Inventor： Max SHTEIN ,  Stephen R. Forrest

IPC: C23C16/04

CPC classification number: C23C14/12 ,  C23C14/24

Abstract: A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block onto a cooled substrate, to form a patterned organic film. A device for carrying out the method is also provided. The device includes a source of organic vapors, a source of carrier gas and a vacuum chamber. A heated nozzle block attached to the source of organic vapors and the source of carrier gas has at least one nozzle adapted to eject carrier gas and organic vapors onto a cooled substrate disposed within the vacuum chamber.

Abstract translation: 提供一种制造有机膜的方法。 非反应性载气用于运输有机蒸气。 将有机蒸气通过喷嘴块喷射到冷却的基底上，以形成图案化的有机膜。 还提供了一种用于执行该方法的装置。 该装置包括有机蒸汽源，载气源和真空室。 连接到有机蒸气源和载气源的加热喷嘴块具有至少一个适于将载气和有机蒸汽喷射到设置在真空室内的冷却基板上的喷嘴。