公开(公告)号：US10024663B2

公开(公告)日：2018-07-17

申请号：US15048020

申请日：2016-02-19

申请人： Maxim Integrated Products, Inc.

发明人： Alessandro Rocchi ,  Eleonora Marchetti ,  Lorenzo Bertini

IPC分类号： G01C19/56 ,  G01C19/04 ,  G01C19/5712 ,  G01C19/5747

摘要： A micromechanical sensor that can detect shock effects in order to prevent false measurements. The sensor includes a substrate having a measurement axis and a detection axis that are disposed orthogonally to each other, and first and second driving masses disposed in a plane containing the measurement and detection axes. Each of the driving masses is rotatably coupled to the substrate via a central suspension disposed on the detection axis. The sensor includes drive electrodes that generate rotary motions in each of the driving masses about a drive axis thereof. At least one elastic connecting element allows the driving masses to deflect in opposite directions in response to a rate of rotation about the measurement axis but deflect in the same direction in response to a shock condition.

公开(公告)号：US20130269469A1

公开(公告)日：2013-10-17

申请号：US13720217

申请日：2012-12-19

申请人： MAXIM INTEGRATED PRODUCTS, INC.

发明人： Alessandro Rocchi ,  Eleonora Marchetti ,  Lorenzo Bertini

IPC分类号： G01C19/04

CPC分类号： G01C19/5712 ,  G01C19/04 ,  G01C19/5747 ,  Y10T74/1293

摘要： A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass (2) disposed in an X-Y plane parallel to the substrate. Each driving mass (2) being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses (2) about the drive axis (Z) at each central suspension. At least one elastic connecting element (5) is disposed on each of the driving masses (2) on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses (2) in a mutually tuned manner.

摘要翻译： 一种用于检测旋转速率的微机械科里奥利旋转速度传感器，包括基板，测量轴（X轴），检测轴（Y轴）和驱动轴（Z轴），每个垂直于 彼此以及设置在平行于基板的XY平面中的第一和第二驱动质量块（2）。 每个驱动质量块（2）通过中心悬架可旋转地连接到基底。 两个中心悬架沿着Y轴设置。 驱动装置用于在每个中央悬架处产生围绕驱动轴线（Z）的驱动质量块（2）的旋转振荡。 至少一个弹性连接元件（5）设置在Y轴两侧的每个驱动质量块（2）上并与其相隔开，用于以相互调谐的方式连接和摆动两个驱动质量块（2） 。

公开(公告)号：US20160169676A1

公开(公告)日：2016-06-16

申请号：US15048020

申请日：2016-02-19

申请人： Maxim Integrated Products, Inc.

发明人： Alessandro Rocchi ,  Eleonora Marchetti ,  Lorenzo Bertini

IPC分类号： G01C19/5712

CPC分类号： G01C19/5712 ,  G01C19/04 ,  G01C19/5747 ,  Y10T74/1293

摘要： A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis, a detection axis, and a drive axis, each disposed orthogonally to each other and a first and a second driving mass disposed in a plane parallel to the substrate. Each driving mass being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the detection axis. Drive electrodes generate rotary motions of the driving masses about the drive axis at each central suspension. Elastic connecting elements are disposed on each of the driving masses on both sides of the detection axis to connect and oscillate the two driving masses to synchronize their rotary motions.

摘要翻译： 一种用于检测旋转速率的微机械科里奥利旋转速度传感器，包括基板，测量轴，检测轴和驱动轴，每个彼此正交配置，以及设置在平行的平面中的第一和第二驱动质量 到基底。 每个驱动质量块通过中心悬架可旋转地连接到基板。 两个中心悬架沿检测轴设置。 驱动电极在每个中央悬架处产生围绕驱动轴的驱动质量的旋转运动。 弹性连接元件设置在检测轴两侧的每个驱动质量块上，以连接和摆动两个驱动质量块以使其旋转运动同步。

公开(公告)号：US09279681B2

公开(公告)日：2016-03-08

申请号：US13720217

申请日：2012-12-19

申请人： Maxim Integrated Products, Inc.

发明人： Alessandro Rocchi ,  Eleonora Marchetti ,  Lorenzo Bertini

IPC分类号： G01C19/56 ,  G01C19/04 ,  G01C19/5712

CPC分类号： G01C19/5712 ,  G01C19/04 ,  G01C19/5747 ,  Y10T74/1293

摘要： A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass (2) disposed in an X-Y plane parallel to the substrate. Each driving mass (2) being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses (2) about the drive axis (Z) at each central suspension. At least one elastic connecting element (5) is disposed on each of the driving masses (2) on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses (2) in a mutually tuned manner.

摘要翻译： 一种用于检测旋转速率的微机械科里奥利旋转速度传感器，包括基板，测量轴（X轴），检测轴（Y轴）和驱动轴（Z轴），每个垂直于 彼此以及设置在平行于基板的XY平面中的第一和第二驱动质量块（2）。 每个驱动质量块（2）通过中心悬架可旋转地连接到基底。 两个中心悬架沿着Y轴设置。 驱动装置用于在每个中央悬架处产生围绕驱动轴线（Z）的驱动质量块（2）的旋转振荡。 至少一个弹性连接元件（5）设置在Y轴两侧的每个驱动质量块（2）上并与其相隔开，用于以相互调谐的方式连接和摆动两个驱动质量块（2） 。