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    Apparatus and methods of using second harmonic generation as a non-invasive optical probe for interface properties in layered structures
    1.
    发明申请
    Apparatus and methods of using second harmonic generation as a non-invasive optical probe for interface properties in layered structures 有权
    使用二次谐波生成作为非侵入性光学探针的分层结构中的界面特性的装置和方法

    公开(公告)号：US20060044641A1

    公开(公告)日：2006-03-02

    申请号：US11019906

    申请日：2004-12-21

    申请人： Michael Alles ,  Norman Tolk ,  Bongim Jun ,  Robert Pasternak ,  Ron Schrimpf ,  Sorin Cristoloveanu

    发明人： Michael Alles ,  Norman Tolk ,  Bongim Jun ,  Robert Pasternak ,  Ron Schrimpf ,  Sorin Cristoloveanu

    IPC分类号： G02F2/02

    CPC分类号： G01N21/63 ,  G01N21/55

    摘要： A method for non-invasively probing at least one interface property in a layered structure having at least one interface. In one embodiment, the method includes the steps of exposing the layered structure to an incident photon beam at an incident angle to produce a reflection beam, measuring intensities of the second harmonic generation signals from the reflection beam, and identifying an initial second harmonic generation intensity and a time evolution of second harmonic generation intensity from the measured second harmonic generation intensities so as to determine the at least one interface property of the layered structure.

    摘要翻译： 一种用于在具有至少一个接口的分层结构中非侵入性探测至少一个接口属性的方法。 在一个实施例中，该方法包括如下步骤：以入射角将入射光子束暴露于入射光子束以产生反射光束，测量来自反射光束的二次谐波产生信号的强度，以及识别初始二次谐波发生强度 以及从所测量的二次谐波发生强度的二次谐波发生强度的时间演变，以便确定层状结构的至少一个界面性质。